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Spin Coater (LT-MS DC Type) ½Ã½ºÅÛ Æ¯ÀåÁ¡ Table Type (DC MotorÀû¿ë) Manual Loading 5000rpmÀÇ È¸Àü Timer¿¡ ÀÇÇÑ 2 Step Process °æÁ¦ÀûÀÎ °¡°Ý ´Ù¾çÇÑ ÇüÅÂÀÇ Spin Chuck Á¦ÀÛ
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½Ã½ºÅÛ Specification
Spin Coater - LT-MS Series - LT-MS CB - LT-MS DC - LT-SS SC - LT-SS AD - LT-SS CB - LT-SS CSC
Spin Develop System
Spin Cleaning System
Track System - LT-AS Series - LT-AS MLC Track - LT-AS (Spin Wet System)
ITEM
Specification
Substrate Size
Max 6" Wafer
Spin Motor
DC Motor
Spin Speed (RPM)
Max 5,000rpm
Chuck
Al 6061 / Acetal / Peek
Bowl Size
280mm
Control
Timer, Trimer
Process Step
2 Step